A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation.

ChunRong Pan Yan Qiao 0004 Naiqi Wu MengChu Zhou A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation. 805-818 2015 45 IEEE Trans. Syst. Man Cybern. Syst. 5 https://doi.org/10.1109/TSMC.2014.2368995 db/journals/tsmc/tsmc45.html#PanQWZ15